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  <titleInfo>
    <nonSort>The </nonSort>
    <title>International Conference on MEMS and Nanotechnology (ICMN'06)</title>
    <subTitle>current challenges and future issues ; held on 14 - 15 March 2006, Pan Pacific Hotel, Kuala Lumpur Malaysia</subTitle>
  </titleInfo>
  <titleInfo type="alternative">
    <title>ICMN'06</title>
  </titleInfo>
  <titleInfo type="alternative">
    <title>Conference on MEMS and nanotechnology</title>
  </titleInfo>
  <titleInfo type="alternative">
    <title>MEMS and nanotechnology</title>
  </titleInfo>
  <name type="conference">
    <namePart>International Conference on MEMS and Nanotechnology Kuala Lumpur) (2006 :</namePart>
    <role>
      <roleTerm authority="marcrelator" type="text">creator</roleTerm>
    </role>
  </name>
  <name type="personal">
    <namePart>Waqar Asrar</namePart>
  </name>
  <name type="personal">
    <namePart>Faris, Walid Fikri</namePart>
  </name>
  <name type="corporate">
    <namePart>International Islamic University Malaysia</namePart>
    <namePart>Kulliyyah of Engineering</namePart>
  </name>
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    <place>
      <placeTerm type="text">Gombak</placeTerm>
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    <publisher>Faculty of Engineering, International Islamic University Malaysia</publisher>
    <dateIssued>2006</dateIssued>
    <issuance/>
  </originInfo>
  <language>
    <languageTerm authority="iso639-2b" type="code">eng</languageTerm>
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  <physicalDescription>
    <extent>ix, 398 p. : ill. ; 30 cm. + 1 computer optical disc (4 3/4 in).</extent>
  </physicalDescription>
  <note type="statement of responsibility">organized by Faculty of Engineering, International Islamic University Malaysia and MIMOS Berhad ; editors Waqar Asrar, Waleed Fekry Faris ... [et al].</note>
  <note>Includes bibliographical references.</note>
  <subject authority="lcsh">
    <topic>Microelectromechanical systems</topic>
    <topic>Congresses</topic>
  </subject>
  <subject authority="lcsh">
    <topic>Nanotechnology</topic>
    <topic>Congresses</topic>
  </subject>
  <classification authority="lcc">TK7875</classification>
  <identifier type="isbn">9834297807 (pbk.)</identifier>
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    <recordIdentifier>  352351</recordIdentifier>
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