TY - GEN AU - Waqar Asrar AU - Faris,Walid Fikri ED - International Conference on MEMS and Nanotechnology ED - International Islamic University Malaysia. TI - The International Conference on MEMS and Nanotechnology (ICMN'06): current challenges and future issues ; held on 14 - 15 March 2006, Pan Pacific Hotel, Kuala Lumpur Malaysia SN - 9834297807 (pbk.) AV - TK7875 PY - 2006/// CY - Gombak PB - Faculty of Engineering, International Islamic University Malaysia KW - Microelectromechanical systems KW - Congresses KW - Nanotechnology N1 - Includes bibliographical references ER -