He, Ming,
Metal-dielectric interfaces in gigascale electronics : thermal and electrical stability /
Ming He, Toh-Ming Lu
- 1 online resource (xi, 149 pages) : illustrations (some color)
- Springer series in materials science, volume 157 0933-033X ; .
- Springer series in materials science ; volume 157 .
Includes bibliographical references and index.
9781461418122 (ebook) 9781461418115 (hardback) 1461418119 (hardback) 9781493943081 (paperback)
2011941622
Microelectronics--Materials
Interfaces (Physical sciences)
Electronic books (Form)
TK7874