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  <titleInfo>
    <title>Metal-dielectric interfaces in gigascale electronics</title>
    <subTitle>thermal and electrical stability</subTitle>
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  <name type="personal">
    <namePart>He, Ming</namePart>
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  <name type="personal">
    <namePart>Lu, T.-M. (Toh-Ming)</namePart>
    <namePart type="date">1943-</namePart>
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    <dateIssued encoding="marc">2012</dateIssued>
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    <extent>1 online resource (xi, 149 pages) : illustrations (some color)</extent>
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  <note type="statement of responsibility">Ming He, Toh-Ming Lu</note>
  <note>Includes bibliographical references and index.</note>
  <subject authority="lcsh">
    <topic>Microelectronics</topic>
    <topic>Materials</topic>
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  <subject authority="lcsh">
    <topic>Interfaces (Physical sciences)</topic>
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  <classification authority="lcc">TK7874</classification>
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      <title>Springer series in materials science ; volume 157</title>
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  <identifier type="isbn">9781461418122 (ebook)</identifier>
  <identifier type="isbn">9781461418115 (hardback)</identifier>
  <identifier type="isbn">1461418119 (hardback)</identifier>
  <identifier type="isbn">9781493943081 (paperback)</identifier>
  <identifier type="lccn">2011941622</identifier>
  <identifier type="uri">https://link.springer.com/book/10.1007/978-1-4614-1812-2</identifier>
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