@book{529576,
	author = {De Bona, Francesco, and Enikov, Eniko T.,},
	title = {Microsystems mechanical design /},
	publisher = {SpringerWienNewYork,},
	year = {2006},
	series = {Courses and lectures ;},
	address = {Wien :},
	url = {https://link.springer.com/book/10.1007/978-3-211-48549-1}
}