03170cam a2200409 i 4500 864443108 20250127103452.0 cr mn#nnnaucua 131202t2006 au a fob 000 0 eng c 321148549X (ebook) 9783211485491 (ebook) 3211374531 (paperback) 9783211374535 (paperback) (OCoLC)864443108 (OCoLC)868918596 (OCoLC)988802711 (OCoLC)1005837154 GW5XE eng rda pn GW5XE COO OCLCF OCLCQ YDXCP E7B EBLCP DEBSZ OCLCA Z5A UAB ESU VT2 N$T OCLCQ CEF U3W OCLCQ OCLCO OCLCQ WURST OCLCA OCLCQ OCLCO UIAM QC176.8.M5 De Bona, Francesco, author editor 602839 Microsystems mechanical design / edited by Francesco de Bona, Eniko T. Enikov Wien : SpringerWienNewYork, 2006 ©2006 1 online resource (211 pages) : illustrations text rdacontent computer rdamedia online resource rdacarrier text file PDF rda Courses and lectures ; number 478 Includes bibliographical references. Introduction to micro-systems and to the techniques for their fabrication / E.T. Enikov -- Microstructures under electrostatic loads / F. De Bona -- Dynamics of mechatronic systems at microscale / E. Brusa -- Continuum microstructures loaded electrostatically / F. De Bona & M. Gh. Munteanu -- Design of electro-thermal micro-positioners / K.V. Lazarov & E.T. Enikov -- Design of compliant micromechanisms / F. De Bona & S. Zelenika -- Micro- and nano-assembly and manipulation techniques for MEMS / E.T. Enikov -- Microfluidics / L.M. Lee, L.S.L. Cheung, Y. Zohar. This book introduces the basic tools used in the mechanical design of microsystems, the fabrication methods for these systems, and several applications of this technology. The links between micro- and nanotechnologies were also discussed and light was shed on the potential applications of microsystems to nano-scale manipulation of matter, thus introducing the topic of nano-scale engineering mechanics. The proposed approach is new in the sense that, with respect to the main publications on this topic, the authors are all mechanical engineers and therefore the aspect related to the mechanics of microsystems is developed deeply in details. Special issues concern an original approach to the study of the static and dynamic behaviour of micro structures loaded electrostatically, microfluidics also concerning pressure driven gas flows and electrokinetically driven liquid flow. The reader can find in this book a systematic, updated and quite complete treatise of the main possible approaches concerning the mechanical design of microsystems. Micromechanics 5255 Electronic books (Form) 217 Enikov, Eniko T., editor 602840 Courses and lectures ; number 478 2336 https://link.springer.com/book/10.1007/978-3-211-48549-1 bib-kak lcc EBOOK 529576 560993 0 0 lcc 0 19 EBOOK IIUM IIUM WEB 2025-01-27 eb QC 176.8 M5 D287M 2006 11100455833 2025-01-27 00:00:00 2025-01-27 EBOOK