Includes bibliographical references.

Introduction to micro-systems and to the techniques for their fabrication / E.T. Enikov -- Microstructures under electrostatic loads / F. De Bona -- Dynamics of mechatronic systems at microscale / E. Brusa -- Continuum microstructures loaded electrostatically / F. De Bona & M. Gh. Munteanu -- Design of electro-thermal micro-positioners / K.V. Lazarov & E.T. Enikov -- Design of compliant micromechanisms / F. De Bona & S. Zelenika -- Micro- and nano-assembly and manipulation techniques for MEMS / E.T. Enikov -- Microfluidics / L.M. Lee, L.S.L. Cheung, Y. Zohar.

This book introduces the basic tools used in the mechanical design of microsystems, the fabrication methods for these systems, and several applications of this technology. The links between micro- and nanotechnologies were also discussed and light was shed on the potential applications of microsystems to nano-scale manipulation of matter, thus introducing the topic of nano-scale engineering mechanics. The proposed approach is new in the sense that, with respect to the main publications on this topic, the authors are all mechanical engineers and therefore the aspect related to the mechanics of microsystems is developed deeply in details. Special issues concern an original approach to the study of the static and dynamic behaviour of micro structures loaded electrostatically, microfluidics also concerning pressure driven gas flows and electrokinetically driven liquid flow. The reader can find in this book a systematic, updated and quite complete treatise of the main possible approaches concerning the mechanical design of microsystems.